Edit: tl;dr: all tools seem to be capable of 28 nm process, except the lithography machines. However, the report (why?) doesn't include the most advanced lithography tools that are known to be manufactured.
Edit: tl;dr: all tools seem to be capable of 28 nm process, except the lithography machines. However, the report (why?) doesn't include the most advanced lithography tools that are known to be manufactured.